Test ket layout for precisely monitoring 3-foil lens...

Details Test ket layout for precisely monitoring 3-foil lens... Test ket layout for precisely monitoring 3-foil lens...

2007-01-16

2007-01-16

Dinh, Paul (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C716S030000, C356S124000, C430S030000, C438S243000

Reexamination Certificate

active

10709075

ABSTRACT:
An H-shaped test key layout for exclusively monitoring 3-foil lens aberration effects during the fabrication of deep-trench capacitor memory devices is disclosed. The COMA lens aberration effect that used to occur along with the 3-foil lens aberration effect is now eliminated by this test key layout.

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