Test device and method for laser alignment calibration

Details Test device and method for laser alignment calibration Test device and method for laser alignment calibration

2007-12-04

2007-12-04

Punnoose, Roy M. (Department: 2886)

Optics: measuring and testing

Angle measuring or angular axial alignment

Apex of angle at observing or detecting station

C356S138000

Reexamination Certificate

active

10942554

ABSTRACT:
A novel test device and method for calibrating the alignment of a laser beam emitted from a laser metrology tool with respect to a target area on a substrate. The test device includes a laser-sensitive material having a calibration pattern that includes a target point. When the tool is properly adjusted, the laser beam strikes the target point and is released to production. If the laser beam misses the target point, the tool is re-adjusted and re-tested until the laser beam strikes the target point.

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