Test device

Details Test device Test device

2008-10-15

2010-10-12

Patel, Paresh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

07812627

ABSTRACT:
A test device includes a movable mounting table having a temperature controlling mechanism therein; a probe card provided with a plurality of probes positioned above the mounting table; and a first temperature control unit for controlling the temperature controlling mechanism so that a target object on the mounting table can be heated to a predetermined temperature to test electrical characteristics of the target object. The mounting table is provided with a heater facing a plurality of probes protruding from the mounting table in the high-temperature test on the target object.

REFERENCES:
patent: 5172049 (1992-12-01), Kiyokawa et al.
patent: 5325052 (1994-06-01), Yamashita
patent: 6583638 (2003-06-01), Costello et al.
patent: 6765401 (2004-07-01), Hamada
patent: 7667474 (2010-02-01), Sunohara et al.
patent: 2007/0182433 (2007-08-01), Natsuhara et al.
patent: 2007/0205788 (2007-09-01), Natsuhara et al.
patent: 2010/0013509 (2010-01-01), Setoguchi et al.

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