Termination structures for super junction devices

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S341000, C257S343000, C257S492000, C257S493000, C257SE29256, C257SE29257

Reexamination Certificate

active

07436025

ABSTRACT:
A semiconductor device10is provided. A first layer12has a first dopant type; a second layer14is provided over the first layer12; and a third layer16is provided over the second layer and has the first dopant type. A plurality of first and second semiconductor regions22, 24are within the third layer. The first semiconductor region22has the first dopant type, and the second semiconductor region24has the second dopant type. The first and second semiconductor regions22, 24are disposed laterally to one another in an alternating pattern to form a super junction, and the super junction terminates with a final second semiconductor region24, 24′ of the second dopant type.

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Bai, Y., et al., Junction Termination Techniques for Super Junction Devices, ISPSO May 22-25, 2000 Toulouse, France, pp. 257-261.
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International Search Report and Written Opinion.

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