Temperature sensor assembly

Electric heating – Heating devices – Resistive element: igniter type

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Details

373136, 219271, 219275, 219425, 118666, C23C 1312

Patent

active

044265697

ABSTRACT:
An effusion cell assembly is disclosed and includes a temperature sensor designed to balance sensor temperature and cell crucible temperature by an increased heat radiation collection.

REFERENCES:
patent: 3508975 (1970-04-01), Osovitz
patent: 3615931 (1971-10-01), Arthur
patent: 3925146 (1975-12-01), Olsen
patent: 4001099 (1977-01-01), Wang
patent: 4181544 (1980-01-01), Cho
patent: 4239955 (1980-12-01), Cho
"Molecular Beam Epitaxy," edited by Brian R. Pamplin, Pergamon Press, 1980, pp. 23-30.
"Molecular Beam Epitaxy," Progress in Solid-State Chemistry, vol. 10, Part 3, (1975), pp. 147-160.
"Molecular Beam Epitaxy," ACTA Electronica, 16, 4, 1973, pp. 323-329.
"A Simple Source Cell Design for MBE," Journal of Vacuum Science and Technology, vol. 20, p. 252, 1982.

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