Temperature sensor and detector cell utilizing the same

Measuring and testing – Gas analysis – By vibration

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Details

73204, 73196, 338 22R, 204192F, G01N 3100, G01F 168, H01C 710

Patent

active

043898769

ABSTRACT:
A temperature sensor uses a thin film structure having an RF sputtered layer of a temperature sensitive material forming a thermistor element deposited on an electrically insulating and thermally insulating substrate. The sensor may include a plurality of deposited thermistor layers arranged on both sides of the substrate and having electrical connection means attached thereto. The sensor is arranged on a substrate suitable for inclusion in a detector cell forming a chamber arranged to be connected to a source of fluid flow.

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