Measuring and testing – Gas analysis – By vibration
Patent
1980-08-26
1983-06-28
Kreitman, Stephen A.
Measuring and testing
Gas analysis
By vibration
73204, 73196, 338 22R, 204192F, G01N 3100, G01F 168, H01C 710
Patent
active
043898769
ABSTRACT:
A temperature sensor uses a thin film structure having an RF sputtered layer of a temperature sensitive material forming a thermistor element deposited on an electrically insulating and thermally insulating substrate. The sensor may include a plurality of deposited thermistor layers arranged on both sides of the substrate and having electrical connection means attached thereto. The sensor is arranged on a substrate suitable for inclusion in a detector cell forming a chamber arranged to be connected to a source of fluid flow.
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Burton Lockwood D.
Carlson David V.
Halista Mitchell J.
Honeywell Inc.
Kreitman Stephen A.
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