Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent
1997-09-10
2000-05-16
Dang, Thi
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
219390, 219121, 324 95, 342159, C23F 102
Patent
active
060632348
ABSTRACT:
The invention relates to a temperature sensing system that accurately measures temperatures of articles or areas using a contact sensor even in a high radio frequency environment. The temperature sensing system includes a sensor probe that contacts with an article or area that is to have its temperature monitored, and a control circuit to amplify signals from the sensor probe. When significant amounts of radio frequency (RF) interference are present, the temperature sensing can be provided with RF shielding, RF filtering, isolated amplifying and/or multiple stages of low pass filtering that suppress the RF interference. The temperature sensing system is particularly well suited for monitoring and measuring temperatures within semiconductor manufacturing equipment, such as etching, deposition, and other processing chambers.
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Chen Jian Janson
Kennedy William S.
Dang Thi
Lam Research Corporation
Zervigon Rudy
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