Thermal measuring and testing – Temperature measurement – Temperature distribution or profile
Patent
1996-11-14
1998-07-21
Gutierrez, Diego F. F.
Thermal measuring and testing
Temperature measurement
Temperature distribution or profile
374120, 374179, G01K 116, G01K 306, G01K 704
Patent
active
057844011
ABSTRACT:
Methods and apparatus are disclosed for measuring the temperature distribution or profile of a specimen at high resolution. An apparatus comprises a thin-film membrane formed of a first thermo-electrically conductive material, the membrane having a first major surface for holding the specimen. The apparatus also comprises a probe having a tip radius operable to contact a second major surface of the membrane opposite the first major surface. The tip radius comprises a second thermo-electrically conductive material that is different from the first thermo-electrically conductive material so as to generate, by the Seebeck effect, a thermo-electromotive force (TEMF) between the tip radius and the thin-film membrane. The probe can be scanned across the second major surface; the TEMF can be measured, processed, and displayed to produce a temperature profile of the specimen.
REFERENCES:
patent: 3084986 (1963-04-01), Schoneck
patent: 4046009 (1977-09-01), Sauer
patent: 4483631 (1984-11-01), Kydd
patent: 4708495 (1987-11-01), Kitzinger et al.
patent: 5441344 (1995-08-01), Cook, III
Nakano Katsushi
Suzuki Yoshihiko
Gutierrez Diego F. F.
Nikon Corporation
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