Temperature dependent electric resistor probe and a method of ma

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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Details

29612, 427 10, H01L 21312, C03C 1500

Patent

active

047087692

DESCRIPTION:

BRIEF SUMMARY
STATE OF THE ART

The invention is based on a method for making a measuring probe of the type which includes a measuring resistor layer of a temperature dependent electrically resistive material applied on a support foil which is mounted on the side of a planar support body. The probe of this invention is used for measuring temperature of intake air mass or fuel in internal combustion engines. Such a measuring probe is known from DE-OS No. 23 02 615. In this patent a temperature dependent electric resistor for a measuring probe is described which consists of a metal layer or coating preferably of gold. The shape of the resistor is made by means of metalizing with masks on a thin plastic foil. The foil is mounted on a support element which is provided with a recess in the area opposite of the resistor layer and the recess is covered by the foil. Thereby, it is obtained that the resistor is mechanically robust, has a small heat capacity and thereby a short thermal time constant, i.e., a high reaction speed with respect to the change of mass and/or temperature of the medium flow. When making this known measuring probe, at first the recess is shaped in the support element, then the foil is mounted on the support element, and subsequently the resistor layer is evaporated on the foil mounted on the support element. In this known method the danger exists that the thin foil may become damaged by pressures exerted, for example, during the mounting on the support element, during the evaporation process of the resistor layer or during the transport of the support element with the mounted foil to the evaporation station, since in the area of the recess the support is missing.


ADVANTAGES OF THE INVENTION

The method in accordance with the invention provides that the entire surface of the pressure sensitive foil is in contact with the support element during the mounting of the metal layer and, if desired, during the mounting of a cover foil, so that the foil carrying the resistor layer is better protected against damages caused by pressure effects and the like, than in the known device in which the recess in the support element is present before mounting of the foil. Moreover, a measuring probe made in accordance with the suggested method is mechanically very stable, so that even when using rapid flowing medium no deformations of the resistor layer occur, which would cause undesirable resistor changes. It is of importance that the original stability of the support element remains preserved until the mounting of the resistor layer and, if need be, the cover foil, because the support element is able to provide a larger resistance to deformation forces than an element which already had been weakened by a recess before the actual manufacturing operation.


DRAWING

Details and features of the invention are provided in the drawing and the subsequent description, whereby one exemplified embodiment is illustrated in a simplified manner in the drawing, wherein:
FIG. 1 illustrates a section through a probe for measuring the temperature or mass of a flowing medium,
FIG. 2 illustrates a plan view of the measuring probe in accordance with FIG. 1 without cover foil, and
FIG. 3 shows schematically the measuring probe arranged in a flow of a medium to be measured.


DESCRIPTION OF THE EXEMPLIFIED EMBODIMENT

The measuring probe illustrated in the figures has a support foil 1 made of temperature resistant plastic, for example, made of polyimide with a one or both sided cover layer made of fluorcarbon. A cover foil 2 which will be described below is made of the same material. Moreover, the measuring probe has a planar support element 3 having two opposite major sides on one of which the foil 1 is mounted by means of welding or adhering. In the exemplified embodiment the support element consists of a plate of metallic material, preferably a CuBe-alloy. The thickness of the plate has a dimension of about 0.3 mm. The plate has a recess 4 in form of a window like, rectangular opening, which will be subsequently discussed in more detail.
A

REFERENCES:
patent: 3115423 (1963-12-01), Ashworth
patent: 4002924 (1977-01-01), Busch
patent: 4103275 (1978-07-01), Diehl et al.
patent: 4129848 (1978-12-01), Frank et al.
patent: 4134095 (1979-01-01), Reddy
patent: 4470872 (1984-09-01), Sudo et al.
patent: 4481049 (1984-11-01), Reichmanis et al.
patent: 4543153 (1985-09-01), Nelson
patent: 4581099 (1986-04-01), Fukaya et al.
patent: 4586829 (1986-05-01), Hubner et al.
patent: 4595298 (1986-06-01), Frederick
patent: 4599136 (1986-07-01), Araps et al.

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