Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2006-06-27
2006-06-27
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S197000, C333S200000, C324S691000, C324S703000
Reexamination Certificate
active
07068125
ABSTRACT:
There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical resonators having mechanical structures that include integrated heating and/or temperature sensing elements. In another aspect, the present invention is directed to fabricate, manufacture, provide and/or control microelectromechanical resonators having mechanical structures that are encapsulated using thin film or wafer level encapsulation techniques in a chamber, and including heating and/or temperature sensing elements disposed in the chamber, on the chamber and/or integrated within the mechanical structures. Other aspects of the inventions will be apparent from the detailed description and claims herein.
REFERENCES:
patent: 4674319 (1987-06-01), Muller et al.
patent: 4849071 (1989-07-01), Evans et al.
patent: 4945769 (1990-08-01), Sidner et al.
patent: 4990462 (1991-02-01), Sliwa, Jr.
patent: 5053627 (1991-10-01), Ruffell et al.
patent: 5075253 (1991-12-01), Sliwa, Jr.
patent: 5080730 (1992-01-01), Wittkower
patent: 5156903 (1992-10-01), Okumura et al.
patent: 5196355 (1993-03-01), Wittkower
patent: 5288650 (1994-02-01), Sandow
patent: 5369544 (1994-11-01), Mastrangelo
patent: 5445991 (1995-08-01), Lee
patent: 5455547 (1995-10-01), Lin et al.
patent: 5461916 (1995-10-01), Fujii et al.
patent: 5470797 (1995-11-01), Mastrangelo
patent: 5476819 (1995-12-01), Warren
patent: 5491604 (1996-02-01), Nguyen et al.
patent: 5504026 (1996-04-01), Kung
patent: 5510156 (1996-04-01), Zhao
patent: 5517123 (1996-05-01), Zhao et al.
patent: 5537083 (1996-07-01), Lin et al.
patent: 5540095 (1996-07-01), Sherman et al.
patent: 5583290 (1996-12-01), Lewis
patent: 5589082 (1996-12-01), Lin et al.
patent: 5604312 (1997-02-01), Lutz
patent: 5605598 (1997-02-01), Greiff
patent: 5613611 (1997-03-01), Johnson et al.
patent: 5616514 (1997-04-01), Muchow et al.
patent: 5620931 (1997-04-01), Tsang et al.
patent: 5627317 (1997-05-01), Offenberg et al.
patent: 5627318 (1997-05-01), Fujii et al.
patent: 5631422 (1997-05-01), Sulzberger et al.
patent: 5640039 (1997-06-01), Chau et al.
patent: 5645684 (1997-07-01), Keller
patent: 5660680 (1997-08-01), Keller
patent: 5679436 (1997-10-01), Zhao
patent: 5683591 (1997-11-01), Offenberg
patent: 5703293 (1997-12-01), Zabler et al.
patent: 5721377 (1998-02-01), Kurle et al.
patent: 5723353 (1998-03-01), Muenzel et al.
patent: 5725729 (1998-03-01), Greiff
patent: 5728936 (1998-03-01), Lutz
patent: 5747353 (1998-05-01), Bashir et al.
patent: 5751041 (1998-05-01), Suzuki et al.
patent: 5760305 (1998-06-01), Greiff
patent: 5760455 (1998-06-01), Hierold et al.
patent: 5761957 (1998-06-01), Oba et al.
patent: 5804083 (1998-09-01), Ishii et al.
patent: 5818227 (1998-10-01), Payne et al.
patent: 5839062 (1998-11-01), Nguyen et al.
patent: 5847280 (1998-12-01), Sherman et al.
patent: 5858809 (1999-01-01), Chau et al.
patent: 5872024 (1999-02-01), Fujii et al.
patent: 5880369 (1999-03-01), Samuels et al.
patent: 5882532 (1999-03-01), Field et al.
patent: 5889207 (1999-03-01), Lutz
patent: 5898218 (1999-04-01), Hirose et al.
patent: 5919364 (1999-07-01), Lebouitz et al.
patent: 5922212 (1999-07-01), Kano et al.
patent: 5937275 (1999-08-01), Münzel et al.
patent: 5948991 (1999-09-01), Nomura et al.
patent: 5955932 (1999-09-01), Nguyen et al.
patent: 5959208 (1999-09-01), Muenzel et al.
patent: 5962949 (1999-10-01), Dhuler et al.
patent: 5969249 (1999-10-01), Roessig et al.
patent: 5969250 (1999-10-01), Greiff
patent: 5976994 (1999-11-01), Nguyen et al.
patent: 5986316 (1999-11-01), Toyoda et al.
patent: 5987989 (1999-11-01), Yamamoto et al.
patent: 5992233 (1999-11-01), Clark
patent: 6009753 (2000-01-01), Tsang et al.
patent: 6028332 (2000-02-01), Kano et al.
patent: 6035714 (2000-03-01), Yazdi et al.
patent: 6048774 (2000-04-01), Yamamoto et al.
patent: 6055858 (2000-05-01), Muenzel et al.
patent: 6065341 (2000-05-01), Ishio et al.
patent: 6067858 (2000-05-01), Clark et al.
patent: 6090718 (2000-07-01), Soga et al.
patent: 6100108 (2000-08-01), Mizuno et al.
patent: 6106735 (2000-08-01), Kurle et al.
patent: 6117701 (2000-09-01), Buchan et al.
patent: 6119518 (2000-09-01), Itou et al.
patent: 6122964 (2000-09-01), Mohaupt et al.
patent: 6125700 (2000-10-01), Tsugai et al.
patent: 6136630 (2000-10-01), Weigold et al.
patent: 6137206 (2000-10-01), Hill
patent: 6140709 (2000-10-01), Muenzel et al.
patent: 6142358 (2000-11-01), Cohn et al.
patent: 6146917 (2000-11-01), Zhang et al.
patent: 6147756 (2000-11-01), Zavracky et al.
patent: 6149190 (2000-11-01), Galvin et al.
patent: 6151966 (2000-11-01), Sakai et al.
patent: 6153839 (2000-11-01), Zavracky et al.
patent: 6156652 (2000-12-01), Michalicek
patent: 6163643 (2000-12-01), Bergmann et al.
patent: 6169321 (2001-01-01), Nguyen et al.
patent: 6170332 (2001-01-01), MacDonald et al.
patent: 6171881 (2001-01-01), Fujii
patent: 6187210 (2001-02-01), Lebouitz et al.
patent: 6187607 (2001-02-01), Offenberg et al.
patent: 6191007 (2001-02-01), Matsui et al.
patent: 6192757 (2001-02-01), Tsang et al.
patent: 6199430 (2001-03-01), Kano et al.
patent: 6199874 (2001-03-01), Galvin et al.
patent: 6204085 (2001-03-01), Strumpell et al.
patent: 6210988 (2001-04-01), Howe et al.
patent: 6214243 (2001-04-01), Muenzel et al.
patent: 6218717 (2001-04-01), Toyoda et al.
patent: 6218762 (2001-04-01), Hill et al.
patent: 6227049 (2001-05-01), Fujii
patent: 6227050 (2001-05-01), Fujii et al.
patent: 6230567 (2001-05-01), Greiff
patent: 6233811 (2001-05-01), Payne et al.
patent: 6236281 (2001-05-01), Nguyen et al.
patent: 6238946 (2001-05-01), Ziegler
patent: 6240782 (2001-06-01), Kato et al.
patent: 6244112 (2001-06-01), Fujii
patent: 6245593 (2001-06-01), Yoshihara et al.
patent: 6248642 (2001-06-01), Dolan et al.
patent: 6249073 (2001-06-01), Nguyen et al.
patent: 6250156 (2001-06-01), Seshia et al.
patent: 6250165 (2001-06-01), Sakai et al.
patent: 6251754 (2001-06-01), Ohshima et al.
patent: 6255741 (2001-07-01), Yoshihara et al.
patent: 6257059 (2001-07-01), Weinberg et al.
patent: 6264363 (2001-07-01), Takahashi et al.
patent: 6274452 (2001-08-01), Miura et al.
patent: 6275034 (2001-08-01), Tran et al.
patent: 6276207 (2001-08-01), Sakai et al.
patent: 6279585 (2001-08-01), Shiraki et al.
patent: 6282960 (2001-09-01), Samuels et al.
patent: 6284670 (2001-09-01), Abe et al.
patent: 6287885 (2001-09-01), Muto et al.
patent: 6291315 (2001-09-01), Nakayama et al.
patent: 6291875 (2001-09-01), Clark et al.
patent: 6291922 (2001-09-01), Dhuler
patent: 6296779 (2001-10-01), Clark et al.
patent: 6297072 (2001-10-01), Tilmans et al.
patent: 6300294 (2001-10-01), Robbins et al.
patent: 6307815 (2001-10-01), Polosky et al.
patent: 6308567 (2001-10-01), Higuchi et al.
patent: 6311555 (2001-11-01), McCall et al.
patent: 6315062 (2001-11-01), Alft et al.
patent: 6318175 (2001-11-01), Muchow et al.
patent: 6318177 (2001-11-01), Buchan et al.
patent: 6323550 (2001-11-01), Martin et al.
patent: 6325886 (2001-12-01), Harris et al.
patent: 6352935 (2002-03-01), Collins et al.
patent: 6355534 (2002-03-01), Cheng et al.
patent: 6373007 (2002-04-01), Calcatera et al.
patent: 6378989 (2002-04-01), Silverbrook
patent: 6379989 (2002-04-01), Kubby et al.
patent: 6386032 (2002-05-01), Lemkin et al.
patent: 6388279 (2002-05-01), Sakai et al.
patent: 6389899 (2002-05-01), Partridge et al.
patent: 6389903 (2002-05-01), Oba et al.
patent: 6391673 (2002-05-01), Ha et al.
patent: 6391674 (2002-05-01), Ziegler
patent: 6392144 (2002-05-01), Filter et al.
patent: 6396372 (2002-05-01), Sakata et al.
patent: 6396711 (2002-05-01), Degani et al.
patent: 6402968 (2002-06-01), Yazdi et al.
patent: 6410361 (2002-06-01), Dhuler et al.
patent: 6413793 (2002-07-01), Lin et al.
patent: 6416831 (2002-07-01), Hara et al.
patent: 6417078 (2002-07-01), Dolan et al.
patent: 6422078 (2002-07-01), Imai
patent: 6423563 (2002-07-01), Fukada et al.
patent: 6423975 (2002-07-01), Smick et al.
patent: 6424074 (2002-07-01), Nguyen
patent: 64
Lutz Markus
Partridge Aaron
Robert & Bosch GmbH
Steinberg Neil A.
Summons Barbara
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