Heat exchange – With timer – programmer – time delay – or condition responsive... – Having heating and cooling capability
Reexamination Certificate
2005-02-15
2005-02-15
Ford, John K. (Department: 3753)
Heat exchange
With timer, programmer, time delay, or condition responsive...
Having heating and cooling capability
C165S264000, C165S061000, C165S064000, C165S290000, C165S080400, C165S297000, C165S298000
Reexamination Certificate
active
06854514
ABSTRACT:
A temperature control and process for adjusting the temperature of a workstation and a work medium at a workstation to a predetermined temperature. The temperature control comprises a cooling vehicle such as a heat exchanger, a coolant temperature sensor and control, a source of fluid coolant such as a manifold, a recirculating pump, a flow line to circulate the coolant to the workstation with the flow line containing a flow regulator and a heater, a bypass valve for bypassing the flow regulator and heater, and a workstation temperature sensor and control. The workstation temperature control controls the operation of the heater and bypass valve so that the temperature of the coolant is below the desired temperature for the workstation, thus achieving a rapid transient response while avoiding overcooling. The coolant temperature control and workstation temperature control may be in a temperature control computer, thus providing a large number of different operating sequences. A number of embodiments of workstations are also described.
REFERENCES:
patent: 3227207 (1966-01-01), Litman
patent: 3229754 (1966-01-01), Hoag
patent: 3236292 (1966-02-01), Smith, Jr.
patent: 3360032 (1967-12-01), Sherwood
patent: 3370454 (1968-02-01), Flores
patent: 3593253 (1971-07-01), Taylor
patent: 3612165 (1971-10-01), Haynes
patent: 3645697 (1972-02-01), Hoffman, Jr.
patent: 4072181 (1978-02-01), Kostura et al.
patent: 4210153 (1980-07-01), Fehlau et al.
patent: 4386650 (1983-06-01), Moen
patent: 4621678 (1986-11-01), Hahn et al.
patent: 4651813 (1987-03-01), Witt et al.
patent: 4729424 (1988-03-01), Mizuno et al.
patent: 4784213 (1988-11-01), Eager et al.
patent: 4789025 (1988-12-01), Brandemuehl et al.
patent: 4956043 (1990-09-01), Kanetomo et al.
patent: 4984628 (1991-01-01), Uchida et al.
patent: 5084671 (1992-01-01), Miyata et al.
patent: 5226472 (1993-07-01), Benevelli et al.
patent: 5348076 (1994-09-01), Asakawa
patent: 5577552 (1996-11-01), Ebinuma et al.
patent: 6308776 (2001-10-01), Sloan et al.
patent: 967751 (1957-11-01), None
patent: 0363098 (1989-09-01), None
patent: 0411916 (1990-07-01), None
patent: 60-167745 (1985-08-01), None
patent: 61-27444 (1986-02-01), None
patent: 62-74112 (1987-04-01), None
patent: 62-237248 (1987-10-01), None
patent: 63-283842 (1988-11-01), None
patent: 2-38805 (1990-09-01), None
patent: 3-62920 (1991-03-01), None
patent: 3-35060 (1991-05-01), None
patent: 4-371751 (1992-12-01), None
patent: 5-93545 (1993-04-01), None
patent: 5-106912 (1993-04-01), None
patent: 5-143169 (1993-06-01), None
patent: 5-253790 (1993-10-01), None
US 5,706,890, 1/1998, Sloan et al. (withdrawn)*
“Polaris 2000 Microlithography Cluster” data sheet and drawings, FSI International, Inc. (1994).
Sematech publication, “Chill plates,” 4 pages (no date).
Reed William G.
Sloan Ben J.
Ford John K.
FSI International Inc.
Kagan Binder PLLC
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