Measuring and testing – Vibration – Resonance – frequency – or amplitude study
Patent
1990-10-05
1992-02-04
Williams, Hezron E.
Measuring and testing
Vibration
Resonance, frequency, or amplitude study
73657, 7386259, G01N 2912, G01H 1300
Patent
active
050850806
ABSTRACT:
A method of measuring the temperature of a sample or alternately, the pressure surrounding a sample, consists of using the photoacoustic effect to measure the resonant frequency of the sample. By measuring the resonant frequency of an object, which varies with changes in the temperature of the sample and the pressure surrounding the sample, a greater signal-to-noise ratio is achieved, thereby increasing the accuracy and robustness of the disclosed method over previous methods of measurement using the photoacoustic effect. To determine the desired parameter, the resulting resonant frequency is compared to values on like samples (or on the sample itself) under known environmental conditions.
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"Infrared-Laser Interferometric Thermometry: A Nonintrusive Technique for Measuring Semiconductor Wafer Temperatures", by V. M. Donnelly and J. A. MCaulley (J. Vac. Sci. Technol.) A 8(1) Jan./Feb. 1990.
"Contribution to the Interferometric Measurement of Sub-Angstrom Vibrations", by Th. Kwaaitaal (Rev. Sci. Instrum., vol. 45, No. 1) Jan. 1974, pp. 39-41.
Finley Rose M.
Micro)n Technology, Inc.
Protigal Stanley N.
Williams Hezron E.
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