Refrigeration – Automatic control – Refrigeration producer
Reexamination Certificate
2006-05-19
2009-12-29
Jiang, Chen-Wen (Department: 3744)
Refrigeration
Automatic control
Refrigeration producer
C062S205000, C062S259200, C165S104330, C118S725000, C361S690000
Reexamination Certificate
active
07637114
ABSTRACT:
A substrate processing apparatus includes: a processing room in which a semiconductor substrate may be treated by a process; a cooling unit positioned to cool the processing room, the cooling unit configured to convey cooling fluid; and a temperature-adjusting unit that alters the temperature of the cooling fluid supplied into the cooling unit. The temperature-adjusting unit has a cycling circuit. The cycling circuit has a compressor configured to compress a refrigerant, a condenser configured to condense the compressed refrigerant, an expander configured to expand the condensed refrigerant, the expander including a plurality of expansion valves arranged in parallel, and an evaporator configured to evaporate the expanded refrigerant, the evaporator positioned to cool the cooling fluid.
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Choi Dong-Hyun
Kim Yong-Dae
Kin Jong-Chul
Park Moon-Soo
Jiang Chen-Wen
Myers Bigel & Sibley & Sajovec
Samsung Electronics Co,. Ltd.
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