Techniques for providing ion source feed materials

Details Techniques for providing ion source feed materials Techniques for providing ion source feed materials

2007-07-11

2010-02-02

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S42300F, C250S424000, C250S425000, C250S426000, C315S111010, C315S111010, C315S005520, C700S121000

Reexamination Certificate

active

07655932

ABSTRACT:
Techniques for providing ion source feed materials are disclosed. In one particular exemplary embodiment, the techniques may be realized as a container for supplying an ion source feed material. The container may comprise an internal cavity to be pre-filled with an ion source feed material. The container may also comprise an outer body configured to be removably loaded into a corresponding housing that is coupled to an ion source chamber via a nozzle assembly. The container may further comprise an outlet to seal in the pre-filled ion source feed material, the outlet being further configured to engage with the nozzle assembly to establish a flow path between the internal cavity and the ion source chamber. The container may be configured to be a disposable component.

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