Techniques for providing a multimode ion source

Details Techniques for providing a multimode ion source Techniques for providing a multimode ion source

2008-06-11

2010-10-12

Vanore, David A (Department: 2881)

Radiant energy

Ion generation

Methods

C250S492210, C250S42300F, C250S42300F, C250S426000

Reexamination Certificate

active

07812321

ABSTRACT:
Techniques for providing a multimode ion source are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation comprising an ion source that operates in multiple modes such that a first mode is an arc-discharge mode and a second mode is an RF mode.

REFERENCES:
patent: 5517084 (1996-05-01), Leung
patent: 5581156 (1996-12-01), Roberts et al.
patent: 5661308 (1997-08-01), Benveniste et al.
patent: 5861630 (1999-01-01), Becker
patent: 6288403 (2001-09-01), Horsky et al.
patent: 6803585 (2004-10-01), Glukhoy
patent: 6958481 (2005-10-01), Horsky et al.
patent: 7022999 (2006-04-01), Horsky et al.
patent: 7064491 (2006-06-01), Horsky et al.
patent: 7586109 (2009-09-01), Perel et al.
patent: 7655931 (2010-02-01), Gupta
patent: 2003/0079688 (2003-05-01), Walther
patent: 2008/0179545 (2008-07-01), Perel et al.
patent: 2008/0237496 (2008-10-01), Gupta
patent: 2008/0302955 (2008-12-01), Dzengeleski et al.
patent: 2009/0166554 (2009-07-01), Radovanov et al.
patent: 2009/0309041 (2009-12-01), Kurunczi et al.
patent: 2009/0314951 (2009-12-01), Biloiu et al.
patent: 2009/0314962 (2009-12-01), Dorai et al.
patent: 2010/0055345 (2010-03-01), Biloiu et al.
patent: 60-253138 (1985-12-01), None
patent: 2006-107974 (2006-04-01), None
Wells, D.K., “A Small Cold Cathode High Intensity Cyclotron Ion Source”IEEE Tranactions on Nuclear Science, Jun. 1967, pp. 70-71.
Yushkov, George Yu et al, “Meeva Ion Source Operated in Purely Gaseous Mode”,Review of Scientific Instruments, vol. 75, No. 5, May 2004, pp. 1582-1584.
Zhizhong, Song et al., “A Slit-End Extraction Penning Ionization Gauge Ion Source with a Permanent Magnet”,Review of Scientific Instruments, vol. 73, No. 2, Feb. 2002, pp. 852-853.

Affiliated with

Also associated with

Rating

Techniques for providing a multimode ion source does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Techniques for providing a multimode ion source, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Techniques for providing a multimode ion source will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4152456