Techniques for ion implantation of molecular ions

Details Techniques for ion implantation of molecular ions Techniques for ion implantation of molecular ions

2008-10-08

2010-10-05

Wells, Nikita (Department: 2881)

Radiant energy

Electrically neutral molecular or atomic beam devices and...

C250S492210, C250S42300F, C250S424000, C250S492200, C250S492300, C118S7230FI, C315S111810, C438S514000

Reexamination Certificate

active

07807961

ABSTRACT:
Techniques for ion implantation of molecular ions are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation comprising an ion implanter for implanting a target material with a molecular ion at a predetermined temperature to improve at least one of strain and amorphization of the target material, wherein the molecular ion is generated in-situ within an ion source.

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