Techniques for controlling a charged particle beam

Details Techniques for controlling a charged particle beam Techniques for controlling a charged particle beam

2007-09-13

2010-10-26

Berman, Jack I (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C315S005410, C315S005390, C315S500000, C315S506000

Reexamination Certificate

active

07820986

ABSTRACT:
Techniques for controlling a charged particle beam are disclosed. In one particular exemplary embodiment, the techniques may be realized as a charged particle acceleration/deceleration system. The charged particle acceleration/deceleration system may comprise an acceleration column. The acceleration column may comprise a plurality of electrodes having apertures through which a charged particle beam may pass. The charged particle acceleration/deceleration system may also comprise a plurality of resistors electrically coupled to the plurality of electrodes. The charged particle acceleration/deceleration system may further comprise a plurality of switches electrically coupled to the plurality of electrodes and the plurality of resistors, each of the plurality of switches may be configured to be selectively switched respectively in a plurality of operation modes.

REFERENCES:
patent: 3238489 (1966-03-01), Hay
patent: 4383180 (1983-05-01), Turner
patent: 6653642 (2003-11-01), Pedersen et al.
patent: 6717079 (2004-04-01), Heller
patent: H08-273896 (1996-10-01), None
http://www.1728.com/project3.htm, Basic Electricity Tutorial—Relays, Published 2000 by 1728 Software Systems, pp. 1-9.
U.S. Appl. No. 11/845,441, Tekletsadik et al.
U.S. Appl. No. 11/847,139, Low et al.
U.S. Appl. No. 11/841,086, Tekletsadik et al.
U.S. Appl. No. 11/527,842, Tekletsadik et al.
U.S. Appl. No. 11/872,576, Low et al.
U.S. Appl. No. 11/968,527, Tekletsadik et al.

Affiliated with

Also associated with

Rating

Techniques for controlling a charged particle beam does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Techniques for controlling a charged particle beam, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Techniques for controlling a charged particle beam will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4222964