Technique for preparation of stoichiometric III-V compound semic

Details Technique for preparation of stoichiometric III-V compound semic Technique for preparation of stoichiometric III-V compound semic

1976-06-16

1977-05-31

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156650, 156656, 204 56R, 252 795, B29C 1708, C25D 1100

Patent

active

040267415

ABSTRACT:
A technique for preparing stoichiometric group III-V compound semiconductor surfaces involves a repetitive anodizing and etching sequence in an aqueous solution of appropriate pH and a basic solution, respectively. Surfaces treated in the described manner evidence a correct surface stoichiometry and minimum carbon contamination.

REFERENCES:
patent: 3798139 (1974-03-01), Schwartz
patent: 3898141 (1975-08-01), Ermanis et al.

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