Technique for depositing coatings by pyrolysis/decomposition of

Details Technique for depositing coatings by pyrolysis/decomposition of Technique for depositing coatings by pyrolysis/decomposition of

1995-09-27

1998-01-06

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

Running length work

118715, 65 601, C23C 1600

Patent

active

057049823

ABSTRACT:
A nozzle for distributing at least one current of precursor gases onto a surface of a moving glass substrate by pyrolysis/decomposition reaction includes a nozzle body, a principal gas feed system for feeding at least one current of precursor gases into the nozzle of the body, and an auxiliary gas feed system independent of the principal gas feed system for feeding at least one of the precursor gases to the nozzle body in the proximity of the principal gas of the nozzle body for locally modifying the chemical composition of the principal gas. The auxiliary gas flow into the nozzle body is controlled at a flow rate which is variable in time.

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