Technique for aligning features on opposite surfaces of a substr

Television – Special applications – Manufacturing

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

356373, 356401, 430311, 348 95, H04N 0718

Patent

active

052989887

ABSTRACT:
A technique for aligning features on opposite surfaces of a substrate by generating a fiducial image at an image plane and identifying the location of the image at a viewing device remote therefrom, e.g., a video display screen. The substrate is placed so that one surface thereof, on which a feature is to be placed in alignment with a corresponding feature already present on the other oppositely disposed surface, is at the image plane. The one surface has photoresist material thereon. With the fiducial image turned off, an image of the feature on the other oppositely disposed surface is presented at the viewing device and the substrate is moved in the image plane until the image of the feature at the viewing device is at the previously identified location of the fiducial image. The fiducial image is then regenerated to mark its location in the photoresist material at the one surface of the substrate, such location then being in alignment with the corresponding feature on the other oppositely disposed surface thereof.

REFERENCES:
patent: 3900244 (1975-08-01), Wiesler
patent: 4448522 (1984-05-01), Raush
patent: 4557995 (1985-12-01), Broers et al.
patent: 4737845 (1988-04-01), Susuki
Diana Nyyssonen, "Practical Method For Edge Detection and Focusing For Linewidth Measurements on Wafers", Optical Engineering Jan. 1987 vol. 26 No. 1.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Technique for aligning features on opposite surfaces of a substr does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Technique for aligning features on opposite surfaces of a substr, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Technique for aligning features on opposite surfaces of a substr will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-796149

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.