Technique for aligning features on opposite surfaces of a substr

Details Technique for aligning features on opposite surfaces of a substr Technique for aligning features on opposite surfaces of a substr

1992-06-02

1994-03-29

Britton, Howard W.

Television

Special applications

Manufacturing

356373, 356401, 430311, 348 95, H04N 0718

Patent

active

052989887

ABSTRACT:
A technique for aligning features on opposite surfaces of a substrate by generating a fiducial image at an image plane and identifying the location of the image at a viewing device remote therefrom, e.g., a video display screen. The substrate is placed so that one surface thereof, on which a feature is to be placed in alignment with a corresponding feature already present on the other oppositely disposed surface, is at the image plane. The one surface has photoresist material thereon. With the fiducial image turned off, an image of the feature on the other oppositely disposed surface is presented at the viewing device and the substrate is moved in the image plane until the image of the feature at the viewing device is at the previously identified location of the fiducial image. The fiducial image is then regenerated to mark its location in the photoresist material at the one surface of the substrate, such location then being in alignment with the corresponding feature on the other oppositely disposed surface thereof.

REFERENCES:
patent: 3900244 (1975-08-01), Wiesler
patent: 4448522 (1984-05-01), Raush
patent: 4557995 (1985-12-01), Broers et al.
patent: 4737845 (1988-04-01), Susuki
Diana Nyyssonen, "Practical Method For Edge Detection and Focusing For Linewidth Measurements on Wafers", Optical Engineering Jan. 1987 vol. 26 No. 1.

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