Tantalum silicide capacitor

Details Tantalum silicide capacitor Tantalum silicide capacitor

1984-10-15

1986-05-13

Hix, L. T.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

29 2542, 361433, H01G 406, H01G 900, H01G 700

Patent

active

045890560

ABSTRACT:
A high capacitance/low leakage capacitor for use in a dynamic RAM cell fabricated from a metal silicide or metal silicide/poly capacitor plate structure, with formation of an anodic metal/silicon/oxygen insulating film over that structure.

REFERENCES:
patent: 3614548 (1971-10-01), Inoue
patent: 3869652 (1975-03-01), Maillot
patent: 4506434 (1985-03-01), Ogawa et al.

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