Coating processes – Electrical product produced – Fluorescent or phosphorescent base coating
Reexamination Certificate
2007-04-03
2007-04-03
Gonzalez, Porfirio Nazario (Department: 1621)
Coating processes
Electrical product produced
Fluorescent or phosphorescent base coating
C427S058000, C029S825000
Reexamination Certificate
active
11224588
ABSTRACT:
Tantalum precursors useful in depositing tantalum nitride or tantalum oxides materials on substrates, by processes such as chemical vapor deposition and atomic layer deposition. The precursors are useful in forming tantalum-based diffusion barrier layers on microelectronic device structures featuring copper metallization and/or ferroelectric thin films.
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Baum Thomas H.
Chen Tianniu
Xu Chongying
Advanced Technology & Materials Inc.
Chappuis Margaret
Gonzalez Porfirio Nazario
Hultquist Steven J.
Intellectual Property / Technology Law
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