Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2005-08-26
2009-08-11
Pert, Evan (Department: 2826)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S532000, C257S535000, C257SE21396, C438S437000, C427S079000
Reexamination Certificate
active
07573086
ABSTRACT:
A capacitor is disclosed that is formed as part of an integrated circuit (IC) fabrication process. The capacitor generally comprises a top conductive plate, a capacitor dielectric and a bottom conductive plate that respectively comprise a patterned layer of tantalum nitride TaN, a layer of a nitride based material and a layer of patterned polysilicon.
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Harakas George Nicholas
Hazelton Courtney Michael
Hendy Gregory Lee
Huber Michael LeRoy
Klawinsky James Wayne
Brady III Wade J.
Pert Evan
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
Wilson Scott R
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