T-gate formation

Details T-gate formation T-gate formation

2005-01-28

2008-08-19

Vu, David (Department: 2818)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having schottky gate

C438S574000

Reexamination Certificate

active

07413942

ABSTRACT:
Methods of forming T-gate structures on a substrate are provided that use only UV-sensitive photoresists. Such methods provide T-gate structures using two lithographic steps using a single wavelength of radiation.

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