Systems and methods for wafer translation

Details Systems and methods for wafer translation Systems and methods for wafer translation

2011-08-09

2011-08-09

Rudawitz, Joshua I (Department: 3652)

Material or article handling

Article reorienting device

Article inverting means

C414S936000

Reexamination Certificate

active

07993093

ABSTRACT:
A two-axis automation system can be used to transfer and rotate wafers between horizontal and vertical orientations necessary for differing steps in a semiconductor fabrication process. The two rotational axes allow for the transfer and rotation to be done in a minimal space and with a minimum amount of swept volume. A transfer arm of the automation system can include a pair of load pads capable of loading and unloading a wafer processing chamber in a single sweep.

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