Systems and methods for overlay shift determination

Details Systems and methods for overlay shift determination Systems and methods for overlay shift determination

2006-08-01

2006-08-01

Pert, Evan (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Test or calibration structure

C257S797000

Reexamination Certificate

active

07084427

ABSTRACT:
The systems and methods enable the determination of the magnitude and direction of overlay of at least two elements in two layers. Overlay measurements along two axes can be obtained using four probe pads and without requiring a decoder. Overlay measurements along a single axis can be obtained using three probe pads and without requiring a decoder. The systems and methods according to this invention require less space and are more time efficient than conventional measurement structures. In the systems and methods of this invention, offsets in a direction are calculated from resistance measurements.

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