Systems and methods for overcoming stiction using a lever

Optical waveguides – With optical coupler – Switch

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C385S019000

Reexamination Certificate

active

06859580

ABSTRACT:
A microstructure is provided including a base layer underlying a first and second structural plates. Operation of the microstructure is capable of overcoming stiction. Methods of operation include providing an edge of the first structural plate in contact with a contact point. A second structural plate is deflected in a way that overcomes stiction between the first structural plate and the contact point. Such deflection can include providing a prying force to lift the first structural plate or a hammering force to disturb any stiction related forces at the contact point.

REFERENCES:
patent: 4330175 (1982-05-01), Fujii et al.
patent: 4733945 (1988-03-01), Bacich
patent: 5061049 (1991-10-01), Hornbeck
patent: 5117311 (1992-05-01), Nomura
patent: 5212582 (1993-05-01), Nelson
patent: 5279924 (1994-01-01), Sakai et al.
patent: 5392151 (1995-02-01), Nelson
patent: 5414540 (1995-05-01), Patel et al.
patent: 5493452 (1996-02-01), Hoshino et al.
patent: 5523878 (1996-06-01), Wallace et al.
patent: 5600383 (1997-02-01), Hornbeck
patent: 5602671 (1997-02-01), Hornbeck
patent: 5757559 (1998-05-01), Nomura et al.
patent: 5768649 (1998-06-01), Pearson
patent: 5867302 (1999-02-01), Fleming
patent: 5886811 (1999-03-01), Min
patent: 5917625 (1999-06-01), Ogusu et al.
patent: 5960133 (1999-09-01), Tomlinson
patent: 5991066 (1999-11-01), Robinson et al.
patent: 5999288 (1999-12-01), Ellinas et al.
patent: 5999672 (1999-12-01), Hunter et al.
patent: 6025951 (2000-02-01), Swart et al.
patent: 6028689 (2000-02-01), Michalicek et al.
patent: 6040935 (2000-03-01), Michalicek
patent: 6052232 (2000-04-01), Iwaka
patent: 6097519 (2000-08-01), Ford
patent: 6097859 (2000-08-01), Solgaard
patent: 6097863 (2000-08-01), Dell et al.
patent: 6108471 (2000-08-01), Zhang et al.
patent: 6128122 (2000-10-01), Drake et al.
patent: 6147790 (2000-11-01), Meier et al.
patent: 6220561 (2001-04-01), Mueller
patent: 6263127 (2001-07-01), Dragone et al.
patent: 6307657 (2001-10-01), Ford
patent: 6449096 (2002-09-01), Fabiny et al.
patent: 6480320 (2002-11-01), Nasiri
patent: 6501877 (2002-12-01), Weverka et al.
patent: 6533947 (2003-03-01), Nasiri et al.
patent: 6535319 (2003-03-01), Buzzetta et al.
patent: 6542653 (2003-04-01), Wu et al.
patent: 6552840 (2003-04-01), Knipe
patent: 6614581 (2003-09-01), Anderson
patent: 6625342 (2003-09-01), Staple et al.
Phillippe, P. et al., “Wavelength demultiplexer: using echelette gratings on silicon substrate,” Applied Optics, vol. 24, No. 7, Apr. 1, 1985.
Rallison, R. D., White Paper on:Dense Wavelength Division Multiplexing(DWDM)and the Dickson Grating, Jan. 6, 2001, 9 pages.
Schilling, M. et al., “Deformation-free overgrowth of reactive Ion beam etched submicron structures in InP by liquid phase epitaxy,” Appl. Phys. Lett. 49 (12), Sep. 22, 1986.
Shams, Mohammad Kazem et al.,Preferential Chemical Etching Of Blazed Gratings in(110)-Oriented GaAs, Optics Letters, Mar. 1979, vol. 4, No. 3, pges. 96-98.
Smith, M.S.D. et al.,Diffraction Gratings Utilizing Total Internal Reflection Facets In Littrow Configuration, IEEE Photonics Technology Letters, Jan. 1, 1999, vol. 11, No. 1, pp. 84-86.
Sun, Z. J. et al., Demultiplexer with 120 channels and 0.29-nm Channel Spacing, IEEE Photonics Technology Letters, vol. 10, No. 1, Jan. 1998.
Tang, W. et al., “Electrostatically Balanced Comb Drive for Controlled Levitation,” Reprinted from Technical Digest IEEE Solid-State Sensor and Actuator Workshop, Jun. 1990; pp. 198-202.
Torcheux, L. et al., “Electrochemical Coupling Effects on the Corrosion of Silicon Samples in HF Solutions,” J. Electrochem.Soc., vol. 142, No. 6, Jun. 1995.
Transducer Elements, Piezo Systems, Inc., Cambridge MA, Catalog #3, 1998, pp. 30-45.
Types and Characteristics of SDH Network Protection Architectures, International Telecommunication Union (ITU-T), Recommendation G.941 Oct., 1998, pp. 1-132.
Vankessel, P. et al., “A MEMS-Based Projection Display,” Proceedings of the IEEE, vol. 86, No. 8, Aug. 1998; pp. 1687-1704.
Wong, Ark-Chew et al.,Anneal-Activated, Tunable, 68 MHz Micromechanical Filters, Center for Integrated Microsystems, Dept. of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, Michigan 48109, Transducers '99, Jun. 7-10, 1999, pp. 1390-1393, Sendai, Japan.
Akiyama, T. et al.; “Controlled Stepwise Motion In Polysilicon Microstructures,” Journal of Microelectromechanical Systems, vol. 2, No. 3, Sep. 1993; pp. 106-110.
Ashruf, C.M.A. et al., “Galvanic porous silicon formation without external contacts,” Sensors and Actuators 74 (1999) pp. 118-122.
Bean, Kenneth et al., “Anisotropic Etching of Silicon,” IEEE Transactions on Electron Devices, vol. Ed-25, No. 10, Oct. 1978.
Ciarlo, Dino R. “A latching accelerometer fabricated by the anisotropic etching of (110) oriented silicon wafers,” Lawrence Livermore Nat'l Laboratory, Mar. 1, 1992.
Dewa, A.S. et al., “Development of a Silicon Two-Axis Micromirror for an Optical CrossConnect,” Solid State Sensors and Actuators Workshop, Hilton Head, South Carolina, pp. 93-96.
Ford, Joseph et al., “Wavelength Add Drop Switching Using Tilting Micromirros,” Journal of Lightwave Technology, vol. 17, No. 5, May 1999.
Grade, J. et al., A Large-Deflection Electrostatic Actuator for Optical Switching Applications, Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, Jun. 4-8, 2000; pp. 97-100.
Graf, U.U. et al.,Fabrication and Evaluation Of An Etched Infrared Diffraction Grating, Applied Optics, Jan. 1, 1994, vol. 33, No. 1, pp. 96-102.
Hopkins, Robert E.,Some Thoughts On Lens Mounting, Optical Engineering, Sep.-Oct. 1976, vol. 15, No. 5, pp. 428-430.
Kaajakari, V. et al.; “Ultrasonic Actuation for MEMS Dormancy-Related Stiction Reduction,” In MEMS Reliability for Critical Applications, Proceedings of SAPIE vol. 4180 (2000); pp. 60-65.
Keller, C. Dissertation entitled: Microfabricated Silicon High Aspect Ratio Flexures for In-Plane Motion, Fall 1998.
Keller, Luke D. et al.,Fabrication And Testing Of Chemically Micromachined Silicon Echelle Gratings, Applied Optics, Mar. 1, 2000, vol. 39, No. 7, pp. 1094-1105.
Koch, T.L. et al., “Anisotropically etched deep gratings for InP/InGaAsP optical devices,” J.App. Phys. 62 (8), Oct. 15, 1987.
Loewen, Erwin G. et al.,Diffraction Gratings and Applications, Marcel Dekker, Inc., New York—Basel, Chapter 4, pp. 132-136 and Chapter 8 pp. 300-301.
Muller, L. Dissertation entitled: Gimballed Electrostatic Microactuators with Embedded Interconnects, Spring 2000.
Nishi, I. et al., “Broad-Passband-Width Optical Filter for Multi-Demultiplexer Using a Diffraction Grating and a Retroreflector Prism,” Electronics Letters, vol. 21, No. 10, 9thMay 1985.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Systems and methods for overcoming stiction using a lever does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Systems and methods for overcoming stiction using a lever, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Systems and methods for overcoming stiction using a lever will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3481727

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.