4. Etching a substrate: processes
  5. Etching of semiconductor material to produce an article...

Lilac Muller

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Bistable micromirror with contactless stops

Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Reexamination Certificate

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Bistable micromirror with contactless stops

Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Reexamination Certificate

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Grating fabrication process using combined...

Etching a substrate: processes – Forming or treating optical article
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Method for reducing leaching in metal-coated MEMS

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Method to reduce release time of micromachined devices

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Responsive to non-optical – non-electrical signal
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Profile ID: LFUS-PAI-P-2569615

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