Systems and methods for overcoming stiction

Details Systems and methods for overcoming stiction Systems and methods for overcoming stiction

2006-10-10

2006-10-10

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S328000, C310S309000, C359S225100, C359S295000, C385S018000

Reexamination Certificate

active

07119474

ABSTRACT:
An electromechanical system includes a structural plate in contact with a stop and an actuator activated by a force for creating a movement of the stop relative to the structural plate, wherein the movement is sufficient to overcome stiction forces between the structural plate and the stop.

REFERENCES:
patent: 5414540 (1995-05-01), Patel et al.
patent: 5917625 (1999-06-01), Ogusu et al.
patent: 5999672 (1999-12-01), Hunter et al.
patent: 6028689 (2000-02-01), Michalicek et al.
patent: 6040935 (2000-03-01), Michalicek
patent: 6097859 (2000-08-01), Solgaard et al.
patent: 6108471 (2000-08-01), Zhang et al.
patent: 6128122 (2000-10-01), Drake et al.
patent: 6791235 (2004-09-01), Miller et al.
patent: 6798114 (2004-09-01), Miller et al.
patent: 6856068 (2005-02-01), Miller et al.
patent: 6856069 (2005-02-01), Miller et al.
patent: 6859580 (2005-02-01), Staple et al.
patent: 6873447 (2005-03-01), Buzzetta
patent: 6891655 (2005-05-01), Grebinski et al.
patent: 6894824 (2005-05-01), Guo et al.
patent: 6903487 (2005-06-01), Shreeve et al.
patent: 6906845 (2005-06-01), Cho et al.
patent: 6914709 (2005-07-01), Monroe et al.
patent: 6949866 (2005-09-01), Miller et al.
patent: 7023603 (2006-04-01), Reboa
patent: 7030537 (2006-04-01), Staple et al.
patent: 7042609 (2006-05-01), Buzzetta
patent: 7042613 (2006-05-01), Barnea et al.
patent: 7068417 (2006-06-01), Yang
patent: 2004/0113515 (2004-06-01), Miller
U.S. Appl. No. 09/442,061, filed Nov. 16, 1999, Weverka et al.
T. Akiyama, et al.; “Controlled Stepwise Motion in Polysilicon Microstructures,” Journal of Microelectromechanical Systems, vol. 2, No. 3, Sep. 1993; pp. 106-110.
Kenneth Bean, et al., “Anisotropic Etching of Silicon,” IEEE Transactions on Electron Devices, vol. Ed-25, No. 10, Oct. 1978.
Dino R. Ciarlo, “A latching accelerometer fabricated by the anisotropic etching of (110) oriented silicon wafers,” Lawrence Livermore Nat'l Laboratory, Mar. 1, 1992.
A.S. Dewa, et al., “Development of a Silicon Two-Axis Micromirror for an Optical Cross-Connect,” Solid State Sensors and Actuators Workshop, Hilton Head, South Carolina, pp. 93-96.
Joseph Ford et al., “Wavelength Add Drop Switching Using Tilting Micromirrors,” Journal of Lightwave Technology, vol. 17, No. 5, May 1999.
J. Grade et al., A Large-Deflection Electrostatic Actuator for Optical Switching Applications, Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, Jun. 4-8, 2000; pp. 97-100.
V. Kaajakari et al.; “Ultrasonic Actuation for MEMS Dormancy-Related Stiction Reductiod,” In MEMS Reliability for Critical Applications, Proceedings of the SAPIE vol. 4180 (2000); pp. 60-65.
T. L. Koch et al., “Anisotropically etched deep gratings for InP/InGaAsP optical devices,” J.App. Phys. 62 (8), Oct. 15, 1987.
I. Nishi et al., “Broad-Passband-Width Optical Filter for Multi-Demultiplexer Using a Diffraction Grating and a Retroreflector Prism,” Electronics Letters, vol. 21, No. 10, May 9, 1985.
P. Phillippe et al., “Wavelength demultiplexer: using echelette gratings on silicon substrate,”. Applied Optics, vol. 24, No. 7, Apr. 1, 1985.
M. Schilling et al., “Deformation-free overgrowth of reactive ion beam etched submicron structures in InP by liquid phase epitaxy,” Appl. Phys. Lett. 49 (12), Sep. 22, 1986.
Z. J. Sun et al., Demultiplexer with 120 channels and 0.29-nm Channel Spacing, IEEE Photonics Technology Letters, vol. 10, No. 1, Jan. 1998.
W. Tang, et al., “Electrostatically Balanced Comb Drive for Controlled Levitation,” Reprinted from Technical Digest IEEE Solid-State Sensor and Actuator Workshop, Jun. 1990; pp. 198-202.
L. Torcheux et al., “Electrochemical Coupling Effects on the Corrosion of Silicon Samples in HF Solutions,” J. Electrochem.Soc., vol. 142, No. 6, Jun. 1995.
P. VanKessel et al., “A MEMS-Based Projection Display,” Proceedings of the IEEE, vol. 86, No. 8, Aug. 1998; pp. 1687-1704.
Microfabricated Silicon High Aspect Ratio Flexures for In-Plane Motion; dissertation by C. Keller, Fall 1998.
Gimballed Electrostatic Microactuators with Embedded Interconnects; dissertation by L. Muller; Spring 2000.

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