Systems and methods for optical measurement

Details Systems and methods for optical measurement Systems and methods for optical measurement

2005-12-30

2008-03-25

Stafira, Michael P. (Department: 2886)

Optics: measuring and testing

By polarized light examination

C356S369000

Reexamination Certificate

active

07349086

ABSTRACT:
A system for measuring optical properties of a sample is provided. A light source provides incident polarized light. A detector detects reflected light from the sample surface. A processor determines a first coefficient (R) of the reflected light detected by the detector, determines a second coefficient (n), extinction coefficient (k), and thickness of the film based on the measured first coefficient, and determines a first dielectric constant (∈1) and a second dielectric constant (∈2) of the film according to the second coefficient (n) and extinction coefficient (k).

REFERENCES:
patent: 7019850 (2006-03-01), Finarov
patent: 7023549 (2006-04-01), Shchegrov et al.
patent: 2003/0128372 (2003-07-01), Sidorowich

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