Systems and methods for measuring belt tension

Details Systems and methods for measuring belt tension Systems and methods for measuring belt tension

2007-03-06

2007-03-06

Noori, Max (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

By loading of specimen

Reexamination Certificate

active

10867904

ABSTRACT:
Systems and methods for measuring belt tension in a semiconductor processing system include measuring a natural sound or an acceleration of the belt in the semiconductor processing system; digitizing the natural sound or the acceleration; determining the frequency and characterizing the belt tension as a function of the frequency.

REFERENCES:
patent: 4375180 (1983-03-01), Scholz
patent: 5435191 (1995-07-01), Kawachi
patent: 5698796 (1997-12-01), Hirano
patent: 5877431 (1999-03-01), Hirano
patent: 6374168 (2002-04-01), Fujii
patent: 2004/0154413 (2004-08-01), Coy et al.

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