Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2006-08-11
2008-10-28
Kim, Peter B (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000
Reexamination Certificate
active
07443483
ABSTRACT:
Systems and methods for controlling fluid flow in an immersion lithography system. The system includes a fluid flow path that allows fluid to flow from a source through a fluid retention hood and then a fluid control valve. The system includes a pressure sensing system for determining a pressure drop across the fluid retention hood. The pressure drop across the fluid retention hood changes with the fluid flow rate. A control system receives signals indicating the pressure drop across the fluid retention hood and produces control signals for the fluid control valve. The control signals adjust the fluid flow rate through the fluid control valve to drive the flow rate to a desired rate, thereby driving the sensed pressure drop across the fluid retention hood to a desired pressure drop.
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International Search Report and Written Opinion mailed Jul. 31, 2008 for International Application No. PCT/US2007/016673.
Clarke Michael
Laverdiere Marc
McLoughlin Robert F.
Entegris, Inc.
Kim Peter B
Sprinkle IP Law Group
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