Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate
2007-10-16
2007-10-16
Meeks, Timothy (Department: 1762)
Coating processes
Coating by vapor, gas, or smoke
C118S715000
Reexamination Certificate
active
10665908
ABSTRACT:
In one embodiment, the system includes a gas supply assembly having a first gas source, a first gas conduit coupled to the first gas source, a first valve assembly, a reaction chamber, and a gas distributor carried by the reaction chamber. The first valve assembly includes first and second valves that are in fluid communication with the first gas conduit. The first and second valves are configured in a parallel arrangement so that the first gas flows through the first valve and/or the second valve.
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Derderian Garo J.
Meng Shuang
Sarigiannis Demetrius
Meeks Timothy
Micro)n Technology, Inc.
Perkins Coie LLP
Stouffer Kelly M
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