Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2007-04-03
2007-04-03
Ho, Tu-Tu (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S594000, C257SE27091, C257SE27095
Reexamination Certificate
active
10985172
ABSTRACT:
The subject invention provides systems and methodologies for fabrication of memory and/or selection (e.g., diodes) elements in a recession in a semiconductor layer. In particular, a trench of varying width is created in the semiconductor layer by employing various etching techniques. A metal film can be deposited in the trench according to a desired deposition thickness in order to seam close a narrow portion of the trench while form a dimple in a wide portion of the trench. The trench, after metal film deposition, exhibits a depression in wider trench portions relative to narrow trench portions. The depression can be utilized by placing one or more memory or selection layers in the depression, and a via can be formed over a portion of the trench to form an interconnect.
REFERENCES:
patent: 2002/0102839 (2002-08-01), Gonzalez et al.
patent: 2005/0184327 (2005-08-01), Ozawa
Shields Jeffrey
Tran Minh
Tripsas Nicholas H.
Amin Turocy & Calvin LLP
Spansion LLC
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