Drying and gas or vapor contact with solids – Apparatus – With means to treat gas or vapor
Reexamination Certificate
2008-07-08
2008-07-08
Gravini, S. (Department: 3749)
Drying and gas or vapor contact with solids
Apparatus
With means to treat gas or vapor
C034S080000, C034S090000, C134S902000, C216S084000, C438S745000
Reexamination Certificate
active
11525278
ABSTRACT:
A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.
REFERENCES:
patent: 5997653 (1999-12-01), Yamasaka
patent: 6491764 (2002-12-01), Mertens et al.
patent: 6988326 (2006-01-01), O'Donnell et al.
patent: 6988327 (2006-01-01), Garcia et al.
patent: 7127831 (2006-10-01), Garcia et al.
de Larios John M.
Garcia James P.
Ravkin Michael
Redeker Fred C.
Woods Carl
Gravini S.
Lam Research Corporation
Martine & Penilla & Gencarella LLP
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