Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1985-08-28
1988-02-16
Church, Craig E.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250310, G01N 2300
Patent
active
047257300
ABSTRACT:
A stereoscopic measuring method and system for measuring the sectional shape of a step formed object such as a semiconductor element carrying a resist and wiring on a wafer. The method and system comprises the steps of means for detecting the images of the step formed object from at least two directions so as to form pictures corresponding to the images detected from different directions, determining the distances D between the upper and lower edges of a step in respective pictures; determining the angles .theta. of inclination of the edge lines with respect to the axis of the pictures, determining the angles of inclination of the standard plane fixed to the step formed object with respect to the viewing directions, and determining, as significant factors of the shape to be determined, the height H and width W of the step formed object.
REFERENCES:
patent: 4039829 (1977-08-01), Kato et al.
patent: 4221965 (1980-09-01), Konishi et al.
"Measurement of Specimen Height . . . " by A. Boyde, Scanning Electron Microscopy/1975 Eighth Annual Scanning Electron Micro. Symp. (4-1975).
"Measuring Surface Variations . . . " by Hoover Journal of Physics E: Scientific Instruments 1971, vol. 4.
"Stereoscopic Observation . . . " Karo et al., 10th Annual Scanning Electron Symposium (4-1977).
"Electron Microscopic Determination . . . " by Heiden reich et al., Journal of Applied Physics, vol. 15, May 1944.
"Digital Picture Processing" 2nd edition by Rosenfeld and Kak Published by Academic Press 1982, vol. 2, pp. 29-37.
IBM Technical Disclosure Bulletin, vol. 26, No. 1, Jun. 1983, pp. 189-190.
"Three-Dimensional Analysis of Stereoscopic Image" by Kobori et al. Info. Processing vol. 22, No. 9, pp. 846-855 (1981).
Arima Juntaro
Furuya Toshihiro
Kato Makoto
Yamagata Shimbu
Yokoyama Tetsuo
Church Craig E.
Freeman John C.
Hitachi , Ltd.
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