System & method for controlling a process-performing apparatus i

Details System & method for controlling a process-performing apparatus i System & method for controlling a process-performing apparatus i

1996-09-24

1999-08-17

Elmore, Reba I.

Boots, shoes, and leggings

364228, 3642281, 3642283, 395846, 395182, 371 32, 711163, G06F 1900, G06F 1100, G06G 766, G01R 3108

Patent

active

059402997

ABSTRACT:
A control system of a semiconductor device manufacturing process is disclosed. The system includes a main host computer, host computers connected to the main host computer and process performing apparatuses connected to the host computers. The system checks the integrity of transferred operational instructions between the host computers and process performing apparatuses, in order to prevent errors in the manufacturing process. When the error is detected the system user is notified by audio signals or visual displays.

REFERENCES:
patent: 3845286 (1974-10-01), Aronstein
patent: 5270222 (1993-12-01), Moslehi
patent: 5355320 (1994-10-01), Erjavic
patent: 5375061 (1994-12-01), Hara
patent: 5399531 (1995-03-01), Wu
patent: 5435682 (1995-07-01), Crabb
patent: 5497331 (1996-03-01), Iriki

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