Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2006-02-23
2010-12-21
Seth, Manav (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C382S145000
Reexamination Certificate
active
07856138
ABSTRACT:
A system software product and a method for evaluating a mask, the method including the stages of: defining multiple CD measurement target windows; defining multiple pattern recognition windows such that the multiple CD measurements windows do not overlap the multiple pattern recognition windows, wherein each CD measurement target window and an associated pattern recognition window are positioned within a measurement area that is scannable without introducing a substantial mechanical movement; performing multiple critical dimension measurements of multiple patterns of an object being manufactured by exposing the mask to radiation, wherein the performing comprises using at least one CD measurement target window and at least one pattern recognition window; and evaluating the mask.
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Abraham Zamir
Afek Orit
Latinsky Sergey
Menadeva Ovadya
Nehmadi Youval
Applied Materials Israel, Ltd.
Seth Manav
SNR Denton US LLP
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