System, method, and computer-readable medium for performing...

Details System, method, and computer-readable medium for performing... System, method, and computer-readable medium for performing...

2007-04-23

2009-08-04

Garbowski, Leigh Marie (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C716S030000

Reexamination Certificate

active

07571421

ABSTRACT:
A method, computer-readable medium, and system for performing data preparation are provided. An integrated circuit design is received, and a plurality of pre-optical proximity correction processes are invoked such that the plurality of pre-optical proximity correction processes are performed in parallel. An optical proximity correction process is invoked in response to a determination that each of the plurality of pre-optical proximity correction processes have completed. A post-optical proximity correction process is invoked in response to a determination that the optical proximity correction process has completed.

REFERENCES:
patent: 7024655 (2006-04-01), Cobb
patent: 7318214 (2008-01-01), Prasad et al.
patent: 7418693 (2008-08-01), Gennari et al.
patent: 2006/0228041 (2006-10-01), Joshi
patent: 2008/0189673 (2008-08-01), Ying

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