System, method and apparatus for constant voltage control of...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Reexamination Certificate

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C438S711000, C438S710000

Reexamination Certificate

active

07053000

ABSTRACT:
A system and method of generating RF includes an RF generator, a variable DC power supply, and a comparator. The RF generator has an RF output coupled to an input of the transducer. The variable DC power supply has a control input and a DC output coupled to the RF generator. The comparator includes a first input coupled to a set point control signal, a second input coupled to the RF generator RF output, and a control signal output coupled to a voltage control input on the variable DC power supply.

REFERENCES:
patent: 4221964 (1980-09-01), Schlereth et al.
patent: 4317223 (1982-02-01), Farmer
patent: 4607323 (1986-08-01), Sokal et al.
patent: 4820377 (1989-04-01), Davis et al.
patent: 5349166 (1994-09-01), Taylor
patent: 5543604 (1996-08-01), Taylor
patent: 5562778 (1996-10-01), Koretsky et al.
patent: 5601655 (1997-02-01), Bok et al.
patent: 5750971 (1998-05-01), Taylor
patent: 5931173 (1999-08-01), Schiele
patent: 5980647 (1999-11-01), Buker et al.
patent: 6016821 (2000-01-01), Puskas
patent: 6019757 (2000-02-01), Scheldrup
patent: 6090106 (2000-07-01), Goble et al.
patent: 6311702 (2001-11-01), Fishkin
patent: 6333268 (2001-12-01), Starov et al.
patent: 6365063 (2002-04-01), Collins et al.
patent: 6368482 (2002-04-01), Oeftering et al.
patent: 6370005 (2002-04-01), Sun et al.
patent: 6395096 (2002-05-01), Madanshetty
patent: 6413873 (2002-07-01), Li et al.
patent: 6445126 (2002-09-01), Arai et al.
patent: 6503454 (2003-01-01), Hadimioglu et al.
patent: 6623700 (2003-09-01), Horine et al.
patent: 6681781 (2004-01-01), Puri et al.
patent: 6706337 (2004-03-01), Hebert
patent: 6713022 (2004-03-01), Noolandi et al.
patent: 6730176 (2004-05-01), Kuyel
patent: 6773954 (2004-08-01), Subramanian et al.
patent: 6822372 (2004-11-01), Puskas
patent: 6837967 (2005-01-01), Berman et al.
patent: 2002/0185370 (2002-12-01), Gopalraja et al.
International Search Report dated Oct. 18, 2004.
Nathan O. Sokal, “Class E-A New Class of High-Efficiency Tuned Single-Ended Switching Power Amplifiers”, Jun., 1975,IEEE Journal of Solid-State Circuits.

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