Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate
2006-05-30
2006-05-30
Lebentritt, Michael (Department: 2812)
Semiconductor device manufacturing: process
Chemical etching
Vapor phase etching
C438S711000, C438S710000
Reexamination Certificate
active
07053000
ABSTRACT:
A system and method of generating RF includes an RF generator, a variable DC power supply, and a comparator. The RF generator has an RF output coupled to an input of the transducer. The variable DC power supply has a control input and a DC output coupled to the RF generator. The comparator includes a first input coupled to a set point control signal, a second input coupled to the RF generator RF output, and a control signal output coupled to a voltage control input on the variable DC power supply.
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Anderson Thomas W.
Knop Robert
Lam Research Corporation
Lebentritt Michael
Lindsay Jr. Walter L.
Martine & Penilla & Gencarella LLP
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