Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-06-14
2005-06-14
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C414S935000
Reexamination Certificate
active
06906783
ABSTRACT:
A system and method are used to protect a mask from being contaminated by airborne particles. They include providing a reticle secured in a two-part cover. The two part cover includes a removable protection device used to protect the reticle from contaminants. The cover can be held inside a pod or box that can be used to transport the cover through a lithography system from an atmospheric section to a vacuum section. While in the vacuum section, the removable cover can be moved during an exposure process during which a pattern on the reticle can be formed on a wafer.
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Copy of European Search Report for Appln. 03 003 288.2 mailed Feb. 12, 2004.
Copy of Partial European Search Report for Appln. No. EP 03 00 3288, mailed Jul. 25, 2003, 3 pages.
Alikhan Abdullah
del Puerto Santiago
Feroce Jonathan H.
Kish Duane P.
Loopstra Erik R.
ASML Holding N.V.
Mathews Alan
Sterne Kessler Goldstein & Fox P.L.L.C.
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