Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate
2007-04-24
2007-04-24
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for original
C355S072000
Reexamination Certificate
active
11299787
ABSTRACT:
A system and method are used to protect a mask from being contaminated by airborne particles. They include providing a reticle secured in a two-part cover. The two part cover includes a removable protection device used to protect the reticle from contaminants. The cover can be held inside a pod or box that can be used to transport the cover through a lithography system from an atmospheric section to a vacuum section. While in the vacuum section, the removable cover can be moved during an exposure process during which a pattern on the reticle can be formed on a wafer.
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Alikhan Abdullah
del Puerto Santiago
Feroce Jonathan H.
Kish Duane P.
Loopstra Erik R.
ASML Holding N.V.
Kim Peter B.
Sterne Kessler Goldstein & Fox P.L.L.C.
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