Conveyors: power-driven – Conveyor system for moving a specific load as a separate unit – System includes a load supported by a conveyor portion which...
Reexamination Certificate
2007-06-26
2007-06-26
Bidwell, James R. (Department: 3651)
Conveyors: power-driven
Conveyor system for moving a specific load as a separate unit
System includes a load supported by a conveyor portion which...
C198S465400, C198S346300
Reexamination Certificate
active
10650310
ABSTRACT:
In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.
REFERENCES:
patent: 1639758 (1927-08-01), Webb
patent: 1906036 (1933-04-01), Wunderlich
patent: 2153071 (1939-04-01), Bishop
patent: 2949996 (1960-08-01), Tonelli
patent: 3058604 (1962-10-01), Harper et al.
patent: 3131801 (1964-05-01), Marchetti
patent: 3184032 (1965-05-01), Jonsson
patent: 3587817 (1971-06-01), Bornstein et al.
patent: 3610448 (1971-10-01), Bornfleth
patent: 3710921 (1973-01-01), Petiet
patent: 3710923 (1973-01-01), Fromme et al.
patent: 3722656 (1973-03-01), Loomis, Jr. et al.
patent: 3734263 (1973-05-01), Dirks
patent: 3815723 (1974-06-01), Wright et al.
patent: 3845286 (1974-10-01), Aronstein et al.
patent: 3901376 (1975-08-01), Dardaine et al.
patent: 3990569 (1976-11-01), Aiuola
patent: 4006813 (1977-02-01), Fluck
patent: 4027246 (1977-05-01), Caccoma et al.
patent: 4029194 (1977-06-01), Feurstein et al.
patent: 4033403 (1977-07-01), Seaton et al.
patent: 4040302 (1977-08-01), Katarao
patent: 4044886 (1977-08-01), Sender
patent: 4166527 (1979-09-01), Beezer
patent: 4222479 (1980-09-01), Dugan et al.
patent: 4261236 (1981-04-01), Verjux
patent: 4266652 (1981-05-01), Bald
patent: 4294344 (1981-10-01), van Maanen
patent: 4340137 (1982-07-01), Foster
patent: 4401522 (1983-08-01), Buschow et al.
patent: 4450950 (1984-05-01), Foote, Jr.
patent: 4506779 (1985-03-01), Seragnoli
patent: 4524858 (1985-06-01), Maxey
patent: 4534843 (1985-08-01), Johnson et al.
patent: 4538720 (1985-09-01), Limousin
patent: 4540088 (1985-09-01), Bergh
patent: 4549647 (1985-10-01), Cosse
patent: 4552261 (1985-11-01), Raudat et al.
patent: 4584944 (1986-04-01), Dehne
patent: 4585126 (1986-04-01), Paddock et al.
patent: 4603770 (1986-08-01), Hartness
patent: 4650264 (1987-03-01), Dahnert
patent: 4653630 (1987-03-01), Bravin
patent: 4667809 (1987-05-01), Raybuck
patent: 4679685 (1987-07-01), Inoko
patent: 4680919 (1987-07-01), Hirama et al.
patent: 4693359 (1987-09-01), Mattei et al.
patent: 4702365 (1987-10-01), Pak
patent: 4708727 (1987-11-01), Cardenas-Franco et al.
patent: 4720006 (1988-01-01), Lenherr
patent: 4730733 (1988-03-01), Kawamura et al.
patent: 4750605 (1988-06-01), Brems et al.
patent: 4759439 (1988-07-01), Hartlepp
patent: 4765453 (1988-08-01), Bucher
patent: 4775046 (1988-10-01), Gramarossa et al.
patent: 4805759 (1989-02-01), Rochet et al.
patent: 4813528 (1989-03-01), Hartlepp
patent: 4830180 (1989-05-01), Ferguson et al.
patent: 4850102 (1989-07-01), Hironaka et al.
patent: 4852717 (1989-08-01), Ross et al.
patent: 4854440 (1989-08-01), Laube et al.
patent: 4869637 (1989-09-01), deGroot
patent: 4898373 (1990-02-01), Newsome
patent: 4901843 (1990-02-01), Lashyro
patent: 4921092 (1990-05-01), Crawford et al.
patent: 4936438 (1990-06-01), Waineo
patent: 5048164 (1991-09-01), Harima
patent: 5052544 (1991-10-01), Anderson
patent: 5086909 (1992-02-01), Powell, Jr.
patent: 5092450 (1992-03-01), Schommartz et al.
patent: 5099896 (1992-03-01), Ritola
patent: 5110249 (1992-05-01), Norman
patent: 5113992 (1992-05-01), Sadamori
patent: 5123518 (1992-06-01), Pfaff
patent: 5135102 (1992-08-01), Sjogren et al.
patent: 5184712 (1993-02-01), Leypold et al.
patent: 5207309 (1993-05-01), Simpkin et al.
patent: 5226211 (1993-07-01), Jones
patent: 5231926 (1993-08-01), Williams et al.
patent: 5256204 (1993-10-01), Wu
patent: 5261935 (1993-11-01), Ishii et al.
patent: 5269119 (1993-12-01), Tolson
patent: 5275275 (1994-01-01), Boldrini et al.
patent: 5332013 (1994-07-01), Sugita et al.
patent: 5341915 (1994-08-01), Cordia et al.
patent: 5372471 (1994-12-01), Wu
patent: 5382127 (1995-01-01), Garric et al.
patent: 5388945 (1995-02-01), Garric et al.
patent: 5390785 (1995-02-01), Garric et al.
patent: 5411358 (1995-05-01), Garric et al.
patent: 5439091 (1995-08-01), Mason
patent: 5460478 (1995-10-01), Akimoto et al.
patent: 5558198 (1996-09-01), Juarez
patent: 5560471 (1996-10-01), Prochut et al.
patent: 5570990 (1996-11-01), Bonora et al.
patent: 5603777 (1997-02-01), Ohashi
patent: 5612886 (1997-03-01), Weng
patent: 5617944 (1997-04-01), McTaggart
patent: 5628614 (1997-05-01), Pazdernik et al.
patent: 5653327 (1997-08-01), Buday, Jr. et al.
patent: 5664254 (1997-09-01), Ohkura et al.
patent: 5667056 (1997-09-01), Kimmet
patent: 5668056 (1997-09-01), Wu et al.
patent: 5762544 (1998-06-01), Zuniga et al.
patent: 5782338 (1998-07-01), Schuster et al.
patent: 5797249 (1998-08-01), Hartness
patent: 5818716 (1998-10-01), Chin et al.
patent: 5823319 (1998-10-01), Resnick et al.
patent: 5827118 (1998-10-01), Johnson et al.
patent: 5829574 (1998-11-01), DelSanto
patent: 5829939 (1998-11-01), Iwai et al.
patent: 5865292 (1999-02-01), Aguilar et al.
patent: 5884392 (1999-03-01), Lafond
patent: 5887701 (1999-03-01), Spatafora
patent: 5888042 (1999-03-01), Oda
patent: 5957648 (1999-09-01), Bachrach
patent: 5976199 (1999-11-01), Wu et al.
patent: 5980183 (1999-11-01), Fosnight
patent: 6026561 (2000-02-01), Lafond
patent: 6036426 (2000-03-01), Hillman
patent: 6048259 (2000-04-01), Asai
patent: 6054181 (2000-04-01), Nanbu et al.
patent: 6082948 (2000-07-01), Fishkin et al.
patent: 6083566 (2000-07-01), Whitesell
patent: 6092979 (2000-07-01), Miselli
patent: 6183186 (2001-02-01), Howells et al.
patent: 6209710 (2001-04-01), Mueller et al.
patent: 6223887 (2001-05-01), Andou
patent: 6227345 (2001-05-01), Miyamoto
patent: 6227346 (2001-05-01), Lecomte et al.
patent: 6227348 (2001-05-01), Frei et al.
patent: 6234300 (2001-05-01), De Vos et al.
patent: 6235634 (2001-05-01), White et al.
patent: 6283692 (2001-09-01), Perlov et al.
patent: 6309279 (2001-10-01), Bowman et al.
patent: 6435331 (2002-08-01), Olson et al.
patent: 6439822 (2002-08-01), Kimura et al.
patent: 6440178 (2002-08-01), Berner et al.
patent: 6511065 (2003-01-01), Cote et al.
patent: 6524463 (2003-02-01), Gramarossa et al.
patent: 6579052 (2003-06-01), Bonora et al.
patent: 6581750 (2003-06-01), Tweedy et al.
patent: 6699329 (2004-03-01), Mueller et al.
patent: 6826986 (2004-12-01), Lim et al.
patent: 6919001 (2005-07-01), Fairbairn et al.
patent: 2002/0090282 (2002-07-01), Bachrach
patent: 2003/0010449 (2003-01-01), Gramarossa et al.
patent: 2004/0062633 (2004-04-01), Rice et al.
patent: 2004/0076496 (2004-04-01), Elliott et al.
patent: 2004/0076596 (2004-04-01), Elliott et al.
patent: 2004/0081538 (2004-04-01), Rice et al.
patent: 2004/0081545 (2004-04-01), Elliott et al.
patent: 2004/0082546 (2004-04-01), Elliott et al.
patent: 2004/0191030 (2004-09-01), Rice et al.
patent: 2004/0193300 (2004-09-01), Rice et al.
patent: 2005/0095110 (2005-05-01), Lowrance et al.
patent: 2005/0273191 (2005-12-01), Englhardt et al.
patent: 0 277 536 (1988-08-01), None
patent: 0 365 589 (1992-09-01), None
patent: 0 582 019 (1994-02-01), None
patent: 0 663 686 (1995-07-01), None
patent: 0717717 (1999-07-01), None
patent: 00735927 (1999-11-01), None
patent: 0 987 750 (2000-03-01), None
patent: 00912426 (2000-08-01), None
patent: 1 134 641 (2001-09-01), None
patent: 63-020151 (1988-01-01), None
patent: 02098157 (1990-04-01), None
patent: 10-256346 (1998-09-01), None
patent: 00062949 (2000-02-01), None
patent: 00335799 (2000-12-01), None
patent: WO 97/09256 (1997-03-01), None
patent: WO 99/64207 (1999-12-01), None
patent: WO 00/69724 (2000-11-01), None
patent: WO 02/19392 (2002-03-01), None
Virvalo, T.K., “Cylinder Speed Synchronization”, Dec. 1978, Hydraulics and Pneumatics, vol. 31, No. 12, pp. 55-57.
Cheng, et al., “Adaptive Synchronization Control of a Robotic Manipulator Operating in an Intelligent Workcell”,
Elliott Martin R.
Englhardt Eric A.
Hudgens Jeffrey C.
Lowrance Robert B.
Rice Michael Robert
Applied Materials Inc.
Dugan & Dugan
LandOfFree
System for transporting substrate carriers does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with System for transporting substrate carriers, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System for transporting substrate carriers will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3886486