System for transferring wafers from cassettes to furnaces and me

Details System for transferring wafers from cassettes to furnaces and me System for transferring wafers from cassettes to furnaces and me

1999-09-23

2000-10-31

Bratlie, Steven A.

Material or article handling

Chamber of a type utilized for a heating function and...

Charging of chamber

414940, 432241, 454187, H01L 2122, F27D 312, B65B 502

Patent

active

061392391

ABSTRACT:
System for treating wafers. It is proposed to place a number of furnaces in one area and wafer racks filled with wafers are introduced into each of these furnaces. The wafer racks are located in trolleys which are filled from cassettes in a central loading/removal device. The central loading/removal device serves for all furnaces.

REFERENCES:
patent: 4375354 (1983-03-01), Henriksson
patent: 4938691 (1990-07-01), Ohkase et al.
patent: 4976613 (1990-12-01), Watanabe
patent: 4981436 (1991-01-01), Wantanabe
patent: 5131842 (1992-07-01), Miyazaki et al.
patent: 5163832 (1992-11-01), Ishii et al.
patent: 5431600 (1995-07-01), Murata et al.
patent: 5788458 (1998-08-01), Bonora

Affiliated with

Also associated with

Rating

System for transferring wafers from cassettes to furnaces and me does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with System for transferring wafers from cassettes to furnaces and me, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System for transferring wafers from cassettes to furnaces and me will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2044493