Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1990-01-09
1991-04-23
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
374 43, 374 44, 374102, H01J 37295
Patent
active
050102508
ABSTRACT:
A system for measuring the thermal characteristic of the surface-lattice of solid state materials with picosecond time resolution uses a picosecond laser pulse which is synchronized with a picosecond electron pulse; the electron pulse being generated by splitting the laser pulse into two beams one of which interacts with the surface under test and the second activates the cathode of an electron gun creating an electron pulse which is, collimated, focused and incident at a small acute angle (1-3 degrees) on the surface. The electron pulse generates a reflection high energy electron diffraction pattern (RHEED) which provides information on the surface temperature in accordance with the Debye-Waller effect. Time resolved measurements are made by using electron pulses which are delayed with respect to the laser pulses by successively greater time intervals.
REFERENCES:
patent: 4446425 (1984-05-01), Valdmanis et al.
patent: 4618819 (1986-10-01), Mourou
Wendelken et al., Review of Scientific Instruments, vol. 47, No. 9, Sept. 1976, pp. 1064-1078.
C. V. Shank, Yen & Hirlimann, Femto-Time-Resolved Surface Structural Dynamics of Optically Excited Silicon, Physical Review Letters, vol. 51, No. 10, Sept. 5, 1983, p. 900.
J. M. Hicks et al., Can Pulse Laser Excitation of Surfaces Be Described by a Thermal Model, Physical Review Letters, vol. 61, No. 22, Nov. 28, 1988, p. 2588.
Solid State Physics, Charles Kittel, 5th El., John Wiley & Sons, 1976, p. 63.
Berman Jack I.
Lukacher Martin
The University of Rochester
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