Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-10-31
2010-02-09
Souw, Bernard E (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000, C250S307000, C850S001000, C850S002000, C850S003000, C033S503000, C033S504000, C073S105000
Reexamination Certificate
active
07659509
ABSTRACT:
In accordance with the invention, a computer pointing device is interfaced with an SPM system to provide real time control of the SPM and improve the ease of use.
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Fromm David Patrick
Workman Richard K.
Agilent Technologie,s Inc.
Souw Bernard E
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