Radiant energy – Inspection of solids or liquids by charged particles
Patent
1989-09-11
1991-03-12
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
250307, 2504401, 2504421, G21K 510
Patent
active
049994948
ABSTRACT:
A scanning probe microscope head, which includes means for scanning a probe over a limited portion of a sample surface, includes a casing having feet resting on the sample surface and is moved by positioning means to different portions of the sample surface while the head slides across the sample surface. In one embodiment, a positioning arm is mounted on a carriage driven by a first feed screw, while a sample support is mounted for adjustment by a second feed screw perpendicular to the first. In a second embodiment, the arm is mounted on an X-Y stage adjusted by perpendicular feed screws. In another embodiment, the head rests on the support surface for the sample and slides along this surface as its position is adjusted. The positioning arm supports one or two magnets which magnetically couple the arm to the head casing. The casing is made of ferromagnetic material or nonmagnetic material with a ferromagnetic insert.
REFERENCES:
patent: 4163168 (1979-07-01), Ishikawa et al.
patent: 4762996 (1988-08-01), Binning et al.
patent: 4785177 (1988-11-01), Besocke
patent: 4798989 (1989-01-01), Miyazaki et al.
patent: 4837445 (1989-06-01), Nishioka et al.
Berman Jack I.
Digital Instruments, Inc.
Nguyen Kiet T.
Roston Ellsworth R.
Schwartz Charles H.
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