Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2008-03-11
2008-03-11
Jarrett, Ryan A. (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S108000
Reexamination Certificate
active
11439265
ABSTRACT:
A semiconductor processing apparatus for processing a semiconductor wafer includes a plurality of sensors for monitoring a processing state, a processing result input unit, a model equation generation unit to generate a model equation for predicting a processing result, a processing result prediction unit which predicts a processing result, and a process recipe control unit. Further, a system is provided which comprises the model equation generation unit is provided at a remote location, and transmits the generated prediction model equation to the semiconductor processing apparatus through a network to control the processing condition of the semiconductor processing apparatus by the process recipe control unit.
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Ikuhara Shoji
Kagoshima Akira
Kitsunai Hiroyuki
Masuda Toshio
Shiraishi Daisuke
Antonelli, Terry Stout & Kraus, LLP.
Hitachi , Ltd.
Jarrett Ryan A.
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