System for, method of and computer program product for...

Details System for, method of and computer program product for... System for, method of and computer program product for...

2006-06-13

2006-06-13

Nghiem, Michael (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Performance or efficiency evaluation

C700S108000

Reexamination Certificate

active

07062409

ABSTRACT:
A method of detecting failure of manufacturing apparatuses has: identifying a low-yield-period apparatus having a significantly lower yield period compared with other manufacturing apparatus and the significantly lower yield period by comparing yields of a plurality of manufacturing apparatuses used in parallel in a specific manufacturing process for each time period when the manufacturing apparatuses were used; identifying a downward-tendency apparatus having a significant downward tendency in yield compared with the other manufacturing apparatus by comparing recent yield trends of the plurality of manufacturing apparatuses; and issuing multi-level warnings to the low-yield-period apparatus and the downward-tendency apparatus.

REFERENCES:
patent: 5274434 (1993-12-01), Morioka et al.
patent: 5726920 (1998-03-01), Chen et al.
patent: 2004/0073327 (2004-04-01), Shimada et al.
patent: 2002-323924 (2002-11-01), None
Laura Peters, “Graphically Analyzing Yield Loss”, Semiconductor International, Oct. 1999, p. 54.

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