System for inspecting exposure pattern data of semiconductor int

Details System for inspecting exposure pattern data of semiconductor int System for inspecting exposure pattern data of semiconductor int

1986-11-25

1988-09-27

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 73PC, 356394, G01R 3102

Patent

active

047744618

ABSTRACT:
A system for inspecting exposure pattern data in the form of coordinate data for forming a reticle of a semiconductor integrated circuit device, on the basis of video signals. The inspection system includes a unit for inputting exposure pattern data in the form of coordinate data form in response to a request for a test region, converting the input exposure pattern data to data corresponding to an actual pattern in a two-dimensional form, storing the converted data, and outputting the stored data in the form of video signals; a unit for testing the exposure pattern data from the inputting and converting unit on the basis of the video signals under a predetermined pattern rule; and a unit for outputting data tested at the pattern testing unit. The pattern test unit includes a variety of test circuits, such as a slit test circuit, a comparator, a combination circuit, etc., used for a pattern test.

REFERENCES:
patent: 4148065 (1979-04-01), Nakagawa
patent: 4259020 (1981-03-01), Babb
patent: 4450579 (1984-05-01), Nakashima et al.
patent: 4479145 (1984-10-01), Azuma et al.
patent: 4498778 (1985-02-01), White
patent: 4509075 (1985-04-01), Simms et al.
patent: 4532650 (1985-07-01), Wihl et al.
patent: 4609939 (1986-09-01), Kozawa et al.
patent: 4614430 (1986-09-01), Hara et al.

Affiliated with

Also associated with

Rating

System for inspecting exposure pattern data of semiconductor int does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with System for inspecting exposure pattern data of semiconductor int, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System for inspecting exposure pattern data of semiconductor int will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2399530